C3H9Al
72.09 g/mol
Electronic ChemicalDanger
Trimethylaluminum
CAS75-24-1EC200-853-0
Category
Electronic Chemical
Compound Class
Organometallic
Primary Use
Semiconductor thin film growth precursor
Trimethylaluminum is an organoaluminum compound that exists as a dimer and is a colorless, pyrophoric liquid. It is primarily used as a precursor in semiconductor thin film growth processes.
Precursor for semiconductor thin film growthSource of aluminum in chemical vapor deposition
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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CAS 75-24-1
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Safety Reference
Danger
H250Catches fire spontaneously if exposed to air
H260In contact with water releases flammable gases which may ignite spontaneously
H314Causes severe skin burns and eye damage
H318Causes serious eye damage
Identifiers
IUPAC Name
trimethylalumane
InChIKey
JLTRXTDYQLMHGR-UHFFFAOYSA-N
SMILES
C[Al](C)C
Synonyms (23)
- Al(Me)3
- Aluminum trimethanide
- Aluminum, trimethyl-
- TRIMETHYLALUMINUM (AL(CH3)3)
- Trimethylalane
- Trimethylaluminum
- Trimethylaluminum, elec. gr.
- trimethyaluminium
- trimethyaluminum
- trimethyl aluminium
- trimethylaiuminium
- trimethylalumane
- trimethylalumimum
- trirnethylaluminium