C4H13NO
91.15 g/mol
Electronic ChemicalDanger
TETRAMETHYLAMMONIUM HYDROXIDE
CAS75-59-2EC200-882-9
Category
Electronic Chemical
Compound Class
Inorganic Salt
Primary Use
Semiconductor photoresist developer and etchant
Tetramethylammonium hydroxide is a corrosive solid or colorless liquid with a strong ammonia-like odor, soluble in water. It is primarily used in semiconductor manufacturing as a photoresist developer and etchant.
Photoresist developer in semiconductor manufacturingAnisotropic etchant for siliconBuffer and titrant in chemical analysis
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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Related Compounds
StrongSame Parent
Tetramethylammonium hydroxide pentahydrate
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structure directing agent
StrongSame Parent
Tetrakis(N,N,N-trimethylmethanaminium) orthosilicate
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Silicate source for chemical synthesis
StrongSame Parent
Tetramethylammonium bicarbonate
CAS58345-96-3
research compound
StrongSame Parent
Tetramethylammonium chloride
CAS75-57-0
Clay stabilizer and chemical intermediate
ReferenceSame Category
Lithium 4,5-dicyano-2-(trifluoromethyl)imidazolate
CAS761441-54-7
Lithium salt for battery electrolyte
ReferenceSame Category
Diisopropyldichlorosilane
CAS7751-38-4
Silane precursor for electronic chemicals
ReferenceSame Category
Germane
CAS7782-65-2
semiconductor production and doping agent
ReferenceSame Category
Hydrogen selenide
CAS7783-07-5
semiconductor preparation and doping
Related Reading
What Are Electronic Resins? The Polymers Inside Chips, Substrates, and Circuit Boards
"Electronic resin" is not one material. It is a family of electronic-grade polymers — epoxy molding compounds, laminate resins, build-up films, and photoresists — defined less by what they are made of than by the electrical, thermal, and dimensional numbers they must hit.
Read moreWhy the AI Boom Is Also a Chemistry Boom: Inside the Ultra-High-Purity Electronic Chemicals Supply Chain Behind HBM, CoWoS, and Electronic-Grade HF
An AI chip isn't just bigger than an ordinary chip — it passes through more lithography, etch, clean, and polish cycles, each consuming ultra-high-purity photoresist, CMP slurry, electronic-grade HF, sulfuric acid, and PGMEA at parts-per-trillion purity. A fact-based map of why this supply chain is short, hard to switch suppliers on, and now visibly tightening.
Read moreSafety Reference
Danger
H300Fatal if swallowed
H310Fatal in contact with skin
H311Toxic in contact with skin
H314Causes severe skin burns and eye damage
H318Causes serious eye damage
H370Causes damage to organs
H372Causes damage to organs through prolonged or repeated exposure
H411Toxic to aquatic life with long lasting effects
H301Toxic if swallowed
Regulatory Compliance1
- CN Catalogue of Hazardous ChemicalsCNRegulation
Customs Tariff Classification
The international HS code for TETRAMETHYLAMMONIUM HYDROXIDE (CAS 75-59-2) is 2923.90.
HS code (international, 6-digit)
2923.90
EU CN code (8-digit)
2923 90 00
Classification per the EU customs inventory ECICS (2026-07 snapshot, HS 2022). National tariff lines and product form can affect the final classification.
Identifiers
IUPAC Name
tetramethylazanium hydroxide
InChIKey
WGTYBPLFGIVFAS-UHFFFAOYSA-M
SMILES
C[N+](C)(C)C.[OH-]
Synonyms (23)
- NMW-W
- TMAH
- TMAOH
- NMD 3
- TETRAMETHYLAMMONIUM HYDROXIDE
- TMAH 10 % in water
- tetramethylammonium oxide
- tetramethylamonium hydroxide
- tetramethylazanium;hydroxide
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