C4H13NO
91.15 g/mol
Electronic ChemicalDanger
TETRAMETHYLAMMONIUM HYDROXIDE
CAS75-59-2EC200-882-9
Category
Electronic Chemical
Compound Class
Inorganic Salt
Primary Use
Semiconductor photoresist developer and etchant
Tetramethylammonium hydroxide is a corrosive solid or colorless liquid with a strong ammonia-like odor, soluble in water. It is primarily used in semiconductor manufacturing as a photoresist developer and etchant.
Photoresist developer in semiconductor manufacturingAnisotropic etchant for siliconBuffer and titrant in chemical analysis
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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CAS 75-59-2
Related Compounds
StrongSame Parent
Tetramethylammonium hydroxide pentahydrate
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structure directing agent
StrongSame Parent
Tetrakis(N,N,N-trimethylmethanaminium) orthosilicate
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Silicate source for chemical synthesis
StrongSame Parent
Tetramethylammonium bicarbonate
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research compound
StrongSame Parent
Tetramethylammonium chloride
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Clay stabilizer and chemical intermediate
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Lithium salt for battery electrolyte
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Diisopropyldichlorosilane
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Silane precursor for electronic chemicals
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Germane
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semiconductor production and doping agent
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Hydrogen selenide
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semiconductor preparation and doping
Safety Reference
Danger
H300Fatal if swallowed
H310Fatal in contact with skin
H311Toxic in contact with skin
H314Causes severe skin burns and eye damage
H318Causes serious eye damage
H370Causes damage to organs
H372Causes damage to organs through prolonged or repeated exposure
H411Toxic to aquatic life with long lasting effects
H301Toxic if swallowed
Identifiers
IUPAC Name
tetramethylazanium hydroxide
InChIKey
WGTYBPLFGIVFAS-UHFFFAOYSA-M
SMILES
C[N+](C)(C)C.[OH-]
Synonyms (23)
- NMW-W
- TMAH
- TMAOH
- NMD 3
- TETRAMETHYLAMMONIUM HYDROXIDE
- TMAH 10 % in water
- tetramethylammonium oxide
- tetramethylamonium hydroxide
- tetramethylazanium;hydroxide