Germane is the simplest germanium hydride, with a tetrahedral structure analogous to methane. It is a key compound in the production of semiconductors, where it serves as a dopant to introduce germanium into silicon or other semiconductor materials.
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CAS 7782-65-2
Hydrogen selenide
semiconductor preparation and doping
Nitrogen trifluoride
chamber-cleaning gas for electronics manufacturing
Germanium tetrafluoride
Semiconductor manufacturing
Titanium tetrafluoride
Electronic chemical precursor
germane
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[GeH4]