F3N
71.002 g/mol
Electronic ChemicalDanger
NITROGEN TRIFLUORIDE
CAS7783-54-2EC232-007-1
Category
Electronic Chemical
Compound Class
Halocarbon
Primary Use
chamber-cleaning gas for electronics manufacturing
Nitrogen trifluoride is an inorganic compound that is a colorless, non-flammable, toxic gas with a slightly musty odor. It is primarily used as a chamber-cleaning gas in electronics manufacturing.
chamber-cleaning gas for electronics manufacturing
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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CAS 7783-54-2
Related Compounds
ReferenceSame Category
Germanium tetrafluoride
CAS7783-58-6
Semiconductor manufacturing
ReferenceSame Category
Titanium tetrafluoride
CAS7783-63-3
Electronic chemical precursor
ReferenceSame Category
Tungsten hexafluoride
CAS7783-82-6
Tungsten chemical vapor deposition source
ReferenceSame Category
Arsenic trihydride
CAS7784-42-1
semiconductor manufacturing dopant
Safety Reference
Danger
H270May cause or intensify fire; oxidizer
H280Contains gas under pressure; may explode if heated
H332Harmful if inhaled
H373May cause damage to organs through prolonged or repeated exposure
H371May cause damage to organs
Identifiers
InChIKey
GVGCUCJTUSOZKP-UHFFFAOYSA-N
SMILES
N(F)(F)F
Synonyms (16)
- N,N,N-Trifluoroamine #
- NF(3) gas
- NITROGEN TRIFLUORIDE
- Nitrogen fluoride
- Nitrogen fluoride (NF3)
- Perfluoroammonia
- Trifluoramine
- Trifluorammonia
- Trifluoroamine
- Trifluoroammonia
- [NF3]
- trifluoridonitrogen
- trifluoroazane