F6W
297.83 g/mol
Electronic ChemicalDanger
Tungsten hexafluoride
CAS7783-82-6EC232-029-1
Category
Electronic Chemical
Compound Class
Halocarbon
Primary Use
Tungsten chemical vapor deposition source
Tungsten hexafluoride is a tungsten compound primarily used as a source for tungsten deposition in chemical vapor deposition processes. It is significant in the electronics industry for forming tungsten interconnects within semiconductor devices.
Tungsten coating via chemical vapor depositionSource of tungsten metal for semiconductor interconnects
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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Related Compounds
StrongSame Parent
Tungsten hexachloride
CAS13283-01-7
Tungsten coatings and vapor deposition
ReferenceSame Category
Arsenic trihydride
CAS7784-42-1
semiconductor manufacturing dopant
ReferenceSame Category
Cesium iodide
CAS7789-17-5
X-ray image intensifier phosphor
ReferenceSame Category
Lithium fluoride
CAS7789-24-4
Optical systems and X-ray spectroscopy
ReferenceSame Category
Silane
CAS7803-62-5
Silicon source for semiconductor deposition
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Read moreSafety Reference
Danger
H280Contains gas under pressure; may explode if heated
H301Toxic if swallowed
H311Toxic in contact with skin
H314Causes severe skin burns and eye damage
H318Causes serious eye damage
H330Fatal if inhaled
Regulatory Compliance1
- CN Catalogue of Hazardous ChemicalsCNRegulation
Customs Tariff Classification
The international HS code for Tungsten hexafluoride (CAS 7783-82-6) is 2826.19.
HS code (international, 6-digit)
2826.19
EU CN code (8-digit)
2826 19 90
Classification per the EU customs inventory ECICS (2026-07 snapshot, HS 2022). National tariff lines and product form can affect the final classification.
Identifiers
IUPAC Name
hexafluorotungsten
InChIKey
NXHILIPIEUBEPD-UHFFFAOYSA-H
SMILES
F[W](F)(F)(F)(F)F
Synonyms (12)
- Hexafluorotungsten
- TUNGSTEN HEXAFLUORIDE (WF6)
- TUNGSTEN(6+) FLUORIDE
- Tungsten fluoride
- Tungsten fluoride (WF6)
- Tungsten hexafluoride
- Tungsten(6+) hexafluoride
- Tungsten(VI) fluoride
- WOLFRAM HEXAFLUORIDE
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