C13H6F3NO5S
345.25 g/mol
Electronic ChemicalWarning
N-Hydroxynaphthalimide triflate
CAS85342-62-7
Category
Electronic Chemical
Compound Class
Heterocycle
Primary Use
photoacid generator for photoresistors
N-Hydroxynaphthalimide triflate is a photoacid generator used in photoresist formulations for semiconductor manufacturing. It is a non-polymer PFAS compound that generates acid upon exposure to light, enabling pattern formation in photoresist layers.
photoacid generator for photoresistorsused in manufacturing semiconductor devices
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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Related Reading
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Read moreSafety Reference
Warning
H319Causes serious eye irritation
Identifiers
IUPAC Name
(1,3-dioxobenzo[de]isoquinolin-2-yl) trifluoromethanesulfonate
InChIKey
LWHOMMCIJIJIGV-UHFFFAOYSA-N
SMILES
C1=CC2=C3C(=C1)C(=O)N(C(=O)C3=CC=C2)OS(=O)(=O)C(F)(F)F
Synonyms (10)
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