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Home/Compounds/Electronic Chemical/Trichloro((perfluorohexyl)ethyl)silane
C8H4Cl3F13Si
481.5 g/mol
Electronic ChemicalDanger

Trichloro(3,3,4,4,5,5,6,6,7,7,8,8,8-tridecafluorooctyl)silane

CAS78560-45-9EC278-947-6
Category
Electronic Chemical
Compound Class
Organometallic
Primary Use
Coating for wafer bonding

Trichloro(3,3,4,4,5,5,6,6,7,7,8,8,8-tridecafluorooctyl)silane is an organosilicon compound used as a coating agent in the semiconductor industry. Its primary significance is in facilitating thin wafer bonding and handling during manufacturing processes.

Coating for thin wafer bonding and handlingSemiconductor wafer thinning

Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.

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Safety Reference

Corrosive
Corrosive
Harmful
Harmful
Danger
H314Causes severe skin burns and eye damage
H335May cause respiratory irritation
Identifiers
IUPAC Name

trichloro(3,3,4,4,5,5,6,6,7,7,8,8,8-tridecafluorooctyl)silane

InChIKey

PISDRBMXQBSCIP-UHFFFAOYSA-N

SMILES

C(C[Si](Cl)(Cl)Cl)C(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F

Synonyms (14)

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