C8F18O5S2
582.2 g/mol
Electronic ChemicalDanger
Nonafluorobutanesulfonic anhydride
CAS36913-91-4EC253-270-9
Category
Electronic Chemical
Compound Class
Halocarbon
Primary Use
Photoacid generator for semiconductor manufacturing
Nonafluorobutanesulfonic anhydride is a high-molecular-weight perfluorinated compound used as a photoacid generator in the semiconductor manufacturing industry. Its primary significance lies in enabling photoresist processes for the production of semiconductor devices.
Photoacid generator for manufacturing semiconductor devicesLaboratory chemical for scientific research and development
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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CAS 36913-91-4
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Safety Reference
Danger
H314Causes severe skin burns and eye damage
H319Causes serious eye irritation
Identifiers
IUPAC Name
1,1,2,2,3,3,4,4,4-nonafluorobutylsulfonyl 1,1,2,2,3,3,4,4,4-nonafluorobutane-1-sulfonate
InChIKey
QKIHLPFZYGFMDK-UHFFFAOYSA-N
SMILES
C(C(C(F)(F)S(=O)(=O)OS(=O)(=O)C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(C(F)(F)F)(F)F
Synonyms (13)
- Nonaflate anhydride