C6H2F8O4
290.06 g/mol
Electronic ChemicalWarning
Octafluoroadipic acid
CAS336-08-3EC206-407-1
Category
Electronic Chemical
Compound Class
Organic Acid
Primary Use
Top antireflective coating in lithography
Octafluoroadipic acid is a fluorinated dicarboxylic acid used as a top antireflective coating in semiconductor lithography. Its structure features two carboxylic acid groups and eight fluorine atoms, contributing to its utility in electronic chemical applications.
Top antireflective coating in lithographyNon-polymer PFAS for semiconductor industry
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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CAS 336-08-3
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Safety Reference
Warning
H315Causes skin irritation
H319Causes serious eye irritation
H335May cause respiratory irritation
Identifiers
IUPAC Name
2,2,3,3,4,4,5,5-octafluorohexanedioic acid
InChIKey
AXRSOGFYDSXLQX-UHFFFAOYSA-N
SMILES
C(=O)(C(C(C(C(C(=O)O)(F)F)(F)F)(F)F)(F)F)O
Synonyms (10)
- HPFLDCA n=4
- Hexanedioic acid, octafluoro-
- Octafluoroadipic acid
- Octafluorohexanedioic acid
- Perfluoroadipic acid
- Perfluorohexanedioic Acid
- diPFHxA