C12H9F13O2
432.18 g/mol
Electronic ChemicalWarning
Tridecafluorohexylethyl methacrylate
CAS2144-53-8EC218-407-9
Category
Electronic Chemical
Compound Class
Ester
Primary Use
Photoresist component for semiconductor manufacturing
Tridecafluorohexylethyl methacrylate is a fluorinated methacrylate monomer used as a photoresist component in semiconductor manufacturing. Its highly fluorinated structure contributes to improved etch resistance and optical properties in photolithographic processes.
Photoresist component for semiconductor manufacturingPhotosensitizer for photoresists
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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ReferenceSame Category
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Related Reading
What Are Electronic Resins? The Polymers Inside Chips, Substrates, and Circuit Boards
"Electronic resin" is not one material. It is a family of electronic-grade polymers — epoxy molding compounds, laminate resins, build-up films, and photoresists — defined less by what they are made of than by the electrical, thermal, and dimensional numbers they must hit.
Read moreWhy the AI Boom Is Also a Chemistry Boom: Inside the Ultra-High-Purity Electronic Chemicals Supply Chain Behind HBM, CoWoS, and Electronic-Grade HF
An AI chip isn't just bigger than an ordinary chip — it passes through more lithography, etch, clean, and polish cycles, each consuming ultra-high-purity photoresist, CMP slurry, electronic-grade HF, sulfuric acid, and PGMEA at parts-per-trillion purity. A fact-based map of why this supply chain is short, hard to switch suppliers on, and now visibly tightening.
Read moreSafety Reference
Warning
H315Causes skin irritation
H319Causes serious eye irritation
H335May cause respiratory irritation
H373May cause damage to organs through prolonged or repeated exposure
H410Very toxic to aquatic life with long lasting effects
Customs Tariff Classification
The international HS code for Tridecafluorohexylethyl methacrylate (CAS 2144-53-8) is 2916.14.
HS code (international, 6-digit)
2916.14
EU CN code (8-digit)
2916 14 00
Classification per the EU customs inventory ECICS (2026-07 snapshot, HS 2022). National tariff lines and product form can affect the final classification.
Identifiers
IUPAC Name
3,3,4,4,5,5,6,6,7,7,8,8,8-tridecafluorooctyl 2-methylprop-2-enoate
InChIKey
CDXFIRXEAJABAZ-UHFFFAOYSA-N
SMILES
CC(=C)C(=O)OCCC(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F
Synonyms (19)
- ACTYFLON G 06B
- CAPSTONE 62MA
- CHEMINOX FAMAC 6
- FAMAC 6
- FLUOWET MA 600
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