C8H18Cl2Si
213.22 g/mol
Electronic ChemicalDanger
Di-tert-Butyldichlorosilane
CAS18395-90-9EC242-273-0
Category
Electronic Chemical
Compound Class
Organometallic
Primary Use
silicon precursor for chemical vapor deposition
Di-tert-butyldichlorosilane is an organosilicon compound primarily used as a silicon precursor in chemical vapor deposition processes. Its structure contains two chlorine atoms and two tert-butyl groups bonded to a central silicon atom.
silicon precursor for chemical vapor deposition
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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Related Compounds
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ReferenceSame Category
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CAS18628-07-4
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Read moreSafety Reference
Danger
H314Causes severe skin burns and eye damage
Identifiers
IUPAC Name
ditert-butyl(dichloro)silane
InChIKey
PDYPRPVKBUOHDH-UHFFFAOYSA-N
SMILES
CC(C)(C)[Si](C(C)(C)C)(Cl)Cl
Synonyms (7)
- di-t-Butyldichorosilane
- di-t-butyldichlorosilane
- di-tert-Butyldichlorosilane
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