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Home/Compounds/Electronic Chemical/Di-tert-butyldichlorosilane
C8H18Cl2Si
213.22 g/mol
Electronic ChemicalDanger

Di-tert-Butyldichlorosilane

CAS18395-90-9EC242-273-0
Category
Electronic Chemical
Compound Class
Organometallic
Primary Use
silicon precursor for chemical vapor deposition

Di-tert-butyldichlorosilane is an organosilicon compound primarily used as a silicon precursor in chemical vapor deposition processes. Its structure contains two chlorine atoms and two tert-butyl groups bonded to a central silicon atom.

silicon precursor for chemical vapor deposition

Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.

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Safety Reference

Corrosive
Corrosive
Danger
H314Causes severe skin burns and eye damage
Identifiers
IUPAC Name

ditert-butyl(dichloro)silane

InChIKey

PDYPRPVKBUOHDH-UHFFFAOYSA-N

SMILES

CC(C)(C)[Si](C(C)(C)C)(Cl)Cl

Synonyms (7)
  • di-t-Butyldichorosilane
  • di-t-butyldichlorosilane
  • di-tert-Butyldichlorosilane