C9H27O4PSi3
314.54 g/mol
Electronic ChemicalDanger
Tris(trimethylsilyl) phosphate
CAS10497-05-9EC234-028-1
Category
Electronic Chemical
Compound Class
Ester
Primary Use
Electronic chemical
Tris(trimethylsilyl) phosphate is an organosilicon compound derived from phosphoric acid, where the three hydroxy groups are replaced by (trimethylsilyl)oxy groups. It is primarily used as an electronic chemical in industrial processes.
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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Read moreSafety Reference
Danger
H225Highly flammable liquid and vapour
H226Flammable liquid and vapour
H314Causes severe skin burns and eye damage
H315Causes skin irritation
H318Causes serious eye damage
H319Causes serious eye irritation
H335May cause respiratory irritation
H412Harmful to aquatic life with long lasting effects
Customs Tariff Classification
The international HS code for Tris(trimethylsilyl) phosphate (CAS 10497-05-9) is 2931.90.
HS code (international, 6-digit)
2931.90
EU CN code (8-digit)
2931 90 00
Classification per the EU customs inventory ECICS (2026-07 snapshot, HS 2022). National tariff lines and product form can affect the final classification.
Identifiers
IUPAC Name
tris(trimethylsilyl) phosphate
InChIKey
QJMMCGKXBZVAEI-UHFFFAOYSA-N
SMILES
C[Si](C)(C)OP(=O)(O[Si](C)(C)C)O[Si](C)(C)C
Synonyms (9)
- Phosphoric acid, triTMS
- Phosphoric acid, tris-TMS
- Tris-(trimethylsilyl)fosfat
- tritrimethylsilyl phosphate
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