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Home/Compounds/Electronic Chemical/Tris(trimethylsilyl) phosphate
C9H27O4PSi3
314.54 g/mol
Electronic ChemicalDanger

Tris(trimethylsilyl) phosphate

CAS10497-05-9EC234-028-1
Category
Electronic Chemical
Compound Class
Ester
Primary Use
Electronic chemical

Tris(trimethylsilyl) phosphate is an organosilicon compound derived from phosphoric acid, where the three hydroxy groups are replaced by (trimethylsilyl)oxy groups. It is primarily used as an electronic chemical in industrial processes.

Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.

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Safety Reference

Flammable
Flammable
Corrosive
Corrosive
Harmful
Harmful
Environmental Hazard
Environmental Hazard
Danger
H225Highly flammable liquid and vapour
H226Flammable liquid and vapour
H314Causes severe skin burns and eye damage
H315Causes skin irritation
H318Causes serious eye damage
H319Causes serious eye irritation
H335May cause respiratory irritation
H412Harmful to aquatic life with long lasting effects
Identifiers
IUPAC Name

tris(trimethylsilyl) phosphate

InChIKey

QJMMCGKXBZVAEI-UHFFFAOYSA-N

SMILES

C[Si](C)(C)OP(=O)(O[Si](C)(C)C)O[Si](C)(C)C

Synonyms (9)
  • Phosphoric acid, triTMS
  • Phosphoric acid, tris-TMS
  • Tris-(trimethylsilyl)fosfat
  • tritrimethylsilyl phosphate