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Home/Compounds/Electronic Chemical/Trichlorosilane
Cl3HSi
135.45 g/mol
Electronic ChemicalDanger

Silane, trichloro-

CAS10025-78-2EC233-042-5
Category
Electronic Chemical
Compound Class
Other
Primary Use
Production of high-purity silicon

This compound is a chemical compound used as a key intermediate in the production of high-purity silicon. It is primarily employed in the electronics industry for the manufacture of polysilicon, which is essential for semiconductors and solar cells.

Production of high-purity siliconManufacture of polysilicon for semiconductors

Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.

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Safety Reference

Flammable
Flammable
Corrosive
Corrosive
Toxic
Toxic
Harmful
Harmful
Health Hazard
Health Hazard
Danger
H224Extremely flammable liquid and vapour
H260In contact with water releases flammable gases which may ignite spontaneously
H302Harmful if swallowed
H314Causes severe skin burns and eye damage
H318Causes serious eye damage
H331Toxic if inhaled
H250Catches fire spontaneously if exposed to air
H332Harmful if inhaled
H370Causes damage to organs
H372Causes damage to organs through prolonged or repeated exposure
H330Fatal if inhaled
H371May cause damage to organs
Identifiers
IUPAC Name

trichlorosilane

InChIKey

ZDHXKXAHOVTTAH-UHFFFAOYSA-N

SMILES

[SiH](Cl)(Cl)Cl

Synonyms (9)
  • Silane, trichloro-
  • Silici-chloroforme
  • Siliciumchloroform
  • Silicochloroform
  • Trichloorsilaan
  • Trichlorosilane
  • Trichlorsilan
  • Triclorosilano