C6H19NSi2
161.39 g/mol
Industrial ChemicalDanger
Hexamethyldisilazane
CAS999-97-3EC213-668-5
Category
Industrial Chemical
Compound Class
Amine
Primary Use
Chemical intermediate for siloxane polymers
Hexamethyldisilazane (HMDS) is an organosilicon compound derived from ammonia where two hydrogen atoms are replaced by trimethylsilyl groups. It is primarily used as a chemical intermediate in the production of siloxane polymers.
Chemical intermediate for siloxane polymers
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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Related Compounds
ReferenceSame Category
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CAS999-61-1
reactive comonomer for thermosetting resins
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Crosslinking agent and monomer
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liquid crystal intermediate
ReferenceSame Category
Tributylsilane
CAS998-41-4
silicon compound intermediate
Safety Reference
Danger
H225Highly flammable liquid and vapour
H302Harmful if swallowed
H332Harmful if inhaled
H311Toxic in contact with skin
H314Causes severe skin burns and eye damage
H412Harmful to aquatic life with long lasting effects
H320Causes eye irritation
H331Toxic if inhaled
H335May cause respiratory irritation
H336May cause drowsiness or dizziness
H370Causes damage to organs
H402Harmful to aquatic life
Regulatory Compliance1
- CN Catalogue of Hazardous ChemicalsCNRegulation
Customs Tariff Classification
The international HS code for Hexamethyldisilazane (CAS 999-97-3) is 2931.90.
HS code (international, 6-digit)
2931.90
EU CN code (8-digit)
2931 90 00
Classification per the EU customs inventory ECICS (2026-07 snapshot, HS 2022). National tariff lines and product form can affect the final classification.
Identifiers
IUPAC Name
[dimethyl-(trimethylsilylamino)silyl]methane
InChIKey
FFUAGWLWBBFQJT-UHFFFAOYSA-N
SMILES
C[Si](C)(C)N[Si](C)(C)C
Synonyms (35)
- HMDS
- OAP
- (Me3Si)2NH
- (TMS)2NH
- Bis(trimethylsilyl)amine
- DISILAZANE,HEXAMETHYL
- HN(TMS)2
- Hexamethyldisilazane
- Hexamethylsilazane
- Lithium hexamethyldisilazane
- hexamethyidisilazane
- hexamethyldisilazan
- hexamethyldisilizane
- hexamethyldisilylamine
- sodium hexamethyldisilazide
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