F4Si
104.079 g/mol
Industrial ChemicalDanger
Tetrafluorosilane
CAS7783-61-1EC232-015-5
Category
Industrial Chemical
Compound Class
Halocarbon
Primary Use
Manufacture of silane and electronic silicon
Tetrafluorosilane is an inorganic compound of silicon and fluorine. It is primarily significant as an intermediate in the manufacture of silane and high-purity silicon used in electronics and photovoltaics.
Manufacture of silaneManufacture of electronic or photovoltaic siliconEtching agent
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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Related Compounds
ReferenceSame Category
Zirconium(IV) fluoride
CAS7783-64-4
Glass manufacturing and nuclear reactors
ReferenceSame Category
Iodine pentafluoride
CAS7783-66-6
Oxidizer and fluorinating agent
ReferenceSame Category
Tantalum pentafluoride
CAS7783-71-3
Friedel-Crafts catalyst
ReferenceSame Category
Ferric ammonium sulfate dodecahydrate
CAS7783-83-7
alum in industrial applications
Safety Reference
Danger
H280Contains gas under pressure; may explode if heated
H300Fatal if swallowed
H310Fatal in contact with skin
H314Causes severe skin burns and eye damage
H330Fatal if inhaled
H331Toxic if inhaled
Regulatory Compliance1
- CN Catalogue of Hazardous ChemicalsCNRegulation
Customs Tariff Classification
The international HS code for Tetrafluorosilane (CAS 7783-61-1) is 2812.90.
HS code (international, 6-digit)
2812.90
EU CN code (8-digit)
2812 90 00
Classification per the EU customs inventory ECICS (2026-07 snapshot, HS 2022). National tariff lines and product form can affect the final classification.
Identifiers
IUPAC Name
tetrafluorosilane
InChIKey
ABTOQLMXBSRXSM-UHFFFAOYSA-N
SMILES
F[Si](F)(F)F
Synonyms (8)
- Perfluorosilane
- SILICON TETRAFLUORIDE
- Silane, tetrafluoro-
- Silicon fluoride (SiF4)
- Tetrafluorosilane
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