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Home/Compounds/Industrial Chemical/Tetrafluoromethane
CF4
88.004 g/mol
Industrial ChemicalWarning

CARBON TETRAFLUORIDE

CAS75-73-0EC200-896-5
Category
Industrial Chemical
Compound Class
Halocarbon
Primary Use
low temperature refrigerant and gaseous insulator

Carbon tetrafluoride is a halocarbon compound used as a low temperature refrigerant and gaseous insulator. It is also employed in the semiconductor industry for plasma etching of silicon wafers.

low temperature refrigerantgaseous insulatorplasma etching of silicon wafers in semiconductor manufacturing

Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.

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Related Compounds

ReferenceSame Category

Methanesulfonic acid

CAS75-75-2

Solvent, catalyst, and chemical intermediate

ReferenceSame Category

Trimethylchlorosilane

CAS75-77-4

Silylating agent and silicone intermediate

ReferenceSame Category

Dimethyldichlorosilane

CAS75-78-5

Production of silicone products and polymers

ReferenceSame Category

Methyltrichlorosilane

CAS75-79-6

Intermediate for silicones production

Safety Reference

Compressed Gas
Compressed Gas
Harmful
Harmful
Warning
H280Contains gas under pressure; may explode if heated
H336May cause drowsiness or dizziness
Regulatory Compliance1
  • CN Catalogue of Hazardous ChemicalsCNRegulation
    Listed· listed since 2015-05-01Source

Customs Tariff Classification

The international HS code for CARBON TETRAFLUORIDE (CAS 75-73-0) is 2903.49.

HS code (international, 6-digit)

2903.49

EU CN code (8-digit)

2903 49 30

Classification per the EU customs inventory ECICS (2026-07 snapshot, HS 2022). National tariff lines and product form can affect the final classification.

Identifiers
IUPAC Name

tetrafluoromethane

InChIKey

TXEYQDLBPFQVAA-UHFFFAOYSA-N

SMILES

C(F)(F)(F)F

Synonyms (27)
  • Arcton 0
  • CARBON TETRAFLUORIDE
  • CFC 14
  • Carbon fluoride (CF4)
  • F 14
  • FC 14
  • Fluorocarbon 14
  • Freon 14
  • Ftoksilol
  • Ftoxycol
  • Halocarbon 14
  • Halon 14
  • Methane, tetrafluoro-
  • Perfluoromethane
  • R 14
  • R 14 (Refrigerant)
  • Refrigerant 14
  • Refrigerant R 14
  • Tetrafluorkohlenstoff
  • Tetrafluormethan
  • Tetrafluorocarbon
  • Tetrafluoromethane
  • Tetrafluoromethane (FC-14)
  • perfluorocarbon
  • tetrafluoridocarbon

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