CF4
88.004 g/mol
Industrial ChemicalWarning
CARBON TETRAFLUORIDE
CAS75-73-0EC200-896-5
Category
Industrial Chemical
Compound Class
Halocarbon
Primary Use
low temperature refrigerant and gaseous insulator
Carbon tetrafluoride is a halocarbon compound used as a low temperature refrigerant and gaseous insulator. It is also employed in the semiconductor industry for plasma etching of silicon wafers.
low temperature refrigerantgaseous insulatorplasma etching of silicon wafers in semiconductor manufacturing
Content scope: Information here supports chemical identification and industrial supply, research, and manufacturing contexts. It is not a therapeutic claim, medical advice, or drug-use instructions.
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CAS 75-73-0
Related Compounds
ReferenceSame Category
Methanesulfonic acid
CAS75-75-2
Solvent, catalyst, and chemical intermediate
ReferenceSame Category
Trimethylchlorosilane
CAS75-77-4
Silylating agent and silicone intermediate
ReferenceSame Category
Dimethyldichlorosilane
CAS75-78-5
Production of silicone products and polymers
ReferenceSame Category
Methyltrichlorosilane
CAS75-79-6
Intermediate for silicones production
Safety Reference
Warning
H280Contains gas under pressure; may explode if heated
H336May cause drowsiness or dizziness
Identifiers
IUPAC Name
tetrafluoromethane
InChIKey
TXEYQDLBPFQVAA-UHFFFAOYSA-N
SMILES
C(F)(F)(F)F
Synonyms (27)
- Arcton 0
- CARBON TETRAFLUORIDE
- CFC 14
- Carbon fluoride (CF4)
- F 14
- FC 14
- Fluorocarbon 14
- Freon 14
- Ftoksilol
- Ftoxycol
- Halocarbon 14
- Halon 14
- Methane, tetrafluoro-
- Perfluoromethane
- R 14
- R 14 (Refrigerant)
- Refrigerant 14
- Refrigerant R 14
- Tetrafluorkohlenstoff
- Tetrafluormethan
- Tetrafluorocarbon
- Tetrafluoromethane
- Tetrafluoromethane (FC-14)
- perfluorocarbon
- tetrafluoridocarbon